SAXS analysis of the effect of H2 dilution on microstructural changes of HWCVD deposited a-SiC:H: Fid-Bau Portal

SAXS analysis of the effect of H2 dilution on microstructural changes of HWCVD deposited a-SiC:H

Swain, B. P.

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SAXS analysis of the effect of H2 dilution on microstructural changes of HWCVD deposited a-SiC:H

Swain, B. P.

SAXS analysis of the effect of H2 dilution on microstructural changes of HWCVD deposited a-SiC:H

Swain, B. P.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

SAXS analysis of the effect of H2 dilution on microstructural changes of HWCVD deposited a-SiC:H

Contributors:

Swain, B. P. (author)

Published in:

MATERIALS LETTERS ; 60 ; 2767-2772

Publication date:

2006-01-01

Size:

6 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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