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    Effect of substrate temperature on HWCVD deposited a-SiC:H film

    New search for: Swain, B. P.
    New search for: Dusane, R. O.

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    Effect of substrate temperature on HWCVD deposited a-SiC:H film

    New search for: Swain, B. P.
    New search for: Dusane, R. O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of substrate temperature on HWCVD deposited a-SiC:H film

    New search for: Swain, B. P.
    New search for: Dusane, R. O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Effect of substrate temperature on HWCVD deposited a-SiC:H film

    Contributors:

    Swain, B. P. (author) / Dusane, R. O. (author)

    Published in:

    MATERIALS LETTERS ; 61 ; 4731-4734

    Publication date:

    2007-01-01

    Size:

    4 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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