Disordered Si/SiGe superlattices grown by ultrahigh vacuum chemical vapor deposition: Fid-Bau Portal

Disordered Si/SiGe superlattices grown by ultrahigh vacuum chemical vapor deposition

Chang, T.-C. / Yeh, W.-K. / Chang, C.-Y. / Jung, T.-G. / Tsai, W.-C. / Huang, G.-W. / Mei, Y.-J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Disordered Si/SiGe superlattices grown by ultrahigh vacuum chemical vapor deposition

Chang, T.-C. / Yeh, W.-K. / Chang, C.-Y. / Jung, T.-G. / Tsai, W.-C. / Huang, G.-W. / Mei, Y.-J.

Disordered Si/SiGe superlattices grown by ultrahigh vacuum chemical vapor deposition

Chang, T.-C. / Yeh, W.-K. / Chang, C.-Y. / Jung, T.-G. / Tsai, W.-C. / Huang, G.-W. / Mei, Y.-J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Disordered Si/SiGe superlattices grown by ultrahigh vacuum chemical vapor deposition

Contributors:

Chang, T.-C. (author) / Yeh, W.-K. (author) / Chang, C.-Y. (author) / Jung, T.-G. (author) / Tsai, W.-C. (author) / Huang, G.-W. (author) / Mei, Y.-J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 92 ; 119-123

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Xu, X. / Kweh, H. / Zhang, Z. et al. | British Library Online Contents | 2006

High Quality SiGe Layer Deposited by a New Ultrahigh Vacuum Chemical Vapor Deposition System

LUO, G. / LIN, X. / CHEN, P. et al. | British Library Online Contents | 2000

Interfacial study of Si-Ge multilayers grown using ultrahigh-vacuum chemical vapor deposition

Lian, D. / Wen, H.-C. | British Library Online Contents | 2013

Epitaxial Si1-x Gex grown into fine contact hole by ultrahigh-vacuum chemical vapor deposition

Nakahata, T. / Sugihara, K. / Furukawa, T. et al. | British Library Online Contents | 2000

Growth of Ge on Silicon by Ultrahigh Vacuum Chemical Vapor Deposition

Cheng, B.-w. / Xue, C.-l. / Luo, L.-p. et al. | British Library Online Contents | 2009