Microstructure of a Damascene sabre after annealing: Fid-Bau Portal

Microstructure of a Damascene sabre after annealing

Reibold, M. / Levin, A. A. / Meyer, D. C. / Paufler, P. / Kochmann, W.

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Microstructure of a Damascene sabre after annealing

Reibold, M. / Levin, A. A. / Meyer, D. C. / Paufler, P. / Kochmann, W.

Microstructure of a Damascene sabre after annealing

Reibold, M. / Levin, A. A. / Meyer, D. C. / Paufler, P. / Kochmann, W.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Microstructure of a Damascene sabre after annealing

Contributors:

Reibold, M. (author) / Levin, A. A. (author) / Meyer, D. C. (author) / Paufler, P. (author) / Kochmann, W. (author)

Published in:

INTERNATIONAL JOURNAL OF MATERIALS RESEARCH ; 97 ; 1172-1182

Publication date:

2006-01-01

Size:

11 pages

ISSN:

1862-5282

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 669.9

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