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    Design of a Rubber Membrane under Substrate for Nanoimprint Lithography Process

    New search for: Han, S. W.
    New search for: Seo, K. J.
    New search for: Lee, J. J.
    New search for: Lee, S. W.
    New search for: Lee, H. J.
    New search for: Kim, J. Y.
    New search for: Lee, S.-B.
    New search for: Kim, Y.-J.

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    Design of a Rubber Membrane under Substrate for Nanoimprint Lithography Process

    New search for: Han, S. W.
    New search for: Seo, K. J.
    New search for: Lee, J. J.
    New search for: Lee, S. W.
    New search for: Lee, H. J.
    New search for: Kim, J. Y.
    New search for: Lee, S.-B.
    New search for: Kim, Y.-J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Design of a Rubber Membrane under Substrate for Nanoimprint Lithography Process

    New search for: Han, S. W.
    New search for: Seo, K. J.
    New search for: Lee, J. J.
    New search for: Lee, S. W.
    New search for: Lee, H. J.
    New search for: Kim, J. Y.
    New search for: Lee, S.-B.
    New search for: Kim, Y.-J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Design of a Rubber Membrane under Substrate for Nanoimprint Lithography Process

    Contributors:

    Han, S. W. (author) / Seo, K. J. (author) / Lee, J. J. (author) / Lee, S. W. (author) / Lee, H. J. (author) / Kim, J. Y. (author) / Lee, S.-B. / Kim, Y.-J.

    Published in:

    Experimental Mechanics in Nano and Biotechnology ; 345-348

    KEY ENGINEERING MATERIALS ; 326/328

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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