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C-AFM-based thickness determination of thin and ultra-thin SiO2 films by use of different conductive-coated probe tips
C-AFM-based thickness determination of thin and ultra-thin SiO2 films by use of different conductive-coated probe tips
C-AFM-based thickness determination of thin and ultra-thin SiO2 films by use of different conductive-coated probe tips
Frammelsberger, W. (author) / Benstetter, G. (author) / Kiely, J. (author) / Stamp, R. (author)
APPLIED SURFACE SCIENCE ; 253 ; 3615-3626
2007-01-01
12 pages
Article (Journal)
English
DDC:
621.35
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