High-Resolution TEM Observation of 4H-SiC (0001) Surface Planarized by Catalyst-Referred Etching: Fid-Bau Portal

High-Resolution TEM Observation of 4H-SiC (0001) Surface Planarized by Catalyst-Referred Etching

Pho, B.V. / Sadakuni, S. / Okamoto, T. / Sagawa, R. / Arima, K. / Sano, Y. / Yamauchi, K.

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High-Resolution TEM Observation of 4H-SiC (0001) Surface Planarized by Catalyst-Referred Etching

Pho, B.V. / Sadakuni, S. / Okamoto, T. / Sagawa, R. / Arima, K. / Sano, Y. / Yamauchi, K.

High-Resolution TEM Observation of 4H-SiC (0001) Surface Planarized by Catalyst-Referred Etching

Pho, B.V. / Sadakuni, S. / Okamoto, T. / Sagawa, R. / Arima, K. / Sano, Y. / Yamauchi, K.

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Check availability in my library

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Document information

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Document information

Title:

High-Resolution TEM Observation of 4H-SiC (0001) Surface Planarized by Catalyst-Referred Etching

Contributors:

Pho, B.V. (author) / Sadakuni, S. (author) / Okamoto, T. (author) / Sagawa, R. (author) / Arima, K. (author) / Sano, Y. (author) / Yamauchi, K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 717/720 ; 873-876

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Sadakuni, S. / Pho, B.V. / Dai, N.X. et al. | British Library Online Contents | 2012

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Sadakuni, S. / Dai, N.X. / Sano, Y. et al. | British Library Online Contents | 2011

Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Bui, P.V. / Sadakuni, S. / Okamoto, T. et al. | British Library Online Contents | 2013

Damage-Free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching

Hara, H. / Sano, Y. / Mimura, H. et al. | British Library Online Contents | 2007

Reduction of Surface Roughness of 4H-SiC by Catalyst-Referred Etching

Okamoto, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2010