Surface Observation of 4H-SiC (0001) Planarized by Catalyst-Referred Etching: Fid-Bau Portal

Surface Observation of 4H-SiC (0001) Planarized by Catalyst-Referred Etching

Sadakuni, S. / Pho, B.V. / Dai, N.X. / Sano, Y. / Yagi, K. / Murata, J. / Okamoto, T. / Tachibana, K. / Yamauchi, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Surface Observation of 4H-SiC (0001) Planarized by Catalyst-Referred Etching

Sadakuni, S. / Pho, B.V. / Dai, N.X. / Sano, Y. / Yagi, K. / Murata, J. / Okamoto, T. / Tachibana, K. / Yamauchi, K.

Surface Observation of 4H-SiC (0001) Planarized by Catalyst-Referred Etching

Sadakuni, S. / Pho, B.V. / Dai, N.X. / Sano, Y. / Yagi, K. / Murata, J. / Okamoto, T. / Tachibana, K. / Yamauchi, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Surface Observation of 4H-SiC (0001) Planarized by Catalyst-Referred Etching

Contributors:

Sadakuni, S. (author) / Pho, B.V. (author) / Dai, N.X. (author) / Sano, Y. (author) / Yagi, K. (author) / Murata, J. (author) / Okamoto, T. (author) / Tachibana, K. (author) / Yamauchi, K. (author)

Published in:

KEY ENGINEERING MATERIALS ; 516 ; 452-456

Publication date:

2012-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Pho, B.V. / Sadakuni, S. / Okamoto, T. et al. | British Library Online Contents | 2012

TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Sadakuni, S. / Dai, N.X. / Sano, Y. et al. | British Library Online Contents | 2011

Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Bui, P.V. / Sadakuni, S. / Okamoto, T. et al. | British Library Online Contents | 2013

Damage-Free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching

Hara, H. / Sano, Y. / Mimura, H. et al. | British Library Online Contents | 2007

Reduction of Surface Roughness of 4H-SiC by Catalyst-Referred Etching

Okamoto, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2010