Growth and modification of thin a-Si:H/a-Ge:H bi-layers to sacrificial c-SiGe alloys through ArF-Excimer laser assisted processing: Fid-Bau Portal

Growth and modification of thin a-Si:H/a-Ge:H bi-layers to sacrificial c-SiGe alloys through ArF-Excimer laser assisted processing

Chiussi, S. / Gontad, F. / Rodriguez, R. / Serra, C. / Serra, J. / Leon, B. / Sulima, T. / Hollt, L. / Eisele, I.

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Growth and modification of thin a-Si:H/a-Ge:H bi-layers to sacrificial c-SiGe alloys through ArF-Excimer laser assisted processing

Chiussi, S. / Gontad, F. / Rodriguez, R. / Serra, C. / Serra, J. / Leon, B. / Sulima, T. / Hollt, L. / Eisele, I.

Growth and modification of thin a-Si:H/a-Ge:H bi-layers to sacrificial c-SiGe alloys through ArF-Excimer laser assisted processing

Chiussi, S. / Gontad, F. / Rodriguez, R. / Serra, C. / Serra, J. / Leon, B. / Sulima, T. / Hollt, L. / Eisele, I.

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Title:

Growth and modification of thin a-Si:H/a-Ge:H bi-layers to sacrificial c-SiGe alloys through ArF-Excimer laser assisted processing

Contributors:

Chiussi, S. (author) / Gontad, F. (author) / Rodriguez, R. (author) / Serra, C. (author) / Serra, J. (author) / Leon, B. (author) / Sulima, T. (author) / Hollt, L. (author) / Eisele, I. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 6030-6033

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Dowling, A. J. / Ghantasala, M. K. / Hayes, J. P. et al. | British Library Online Contents | 2002

Finite elements analysis of heteroepitaxial SiGe layers grown by excimer laser

Conde, J. C. / Gonzalez, P. / Lusquinos, F. et al. | British Library Online Contents | 2005

Excimer laser modification of thin AlN films

Georgiev, D. G. / Rosenberger, L. W. / Danylyuk, Y. V. et al. | British Library Online Contents | 2005

Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing

Lopez, E. / Chiussi, S. / Serra, J. et al. | British Library Online Contents | 2004

Interfacial processes in the Pd/a-Ge:H system

Edelman, F. / Cytermann, C. / Brener, R. et al. | British Library Online Contents | 1993