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Micro-area analysis in SIMS depth profiling by mesa-structure preparation

Seki, S. / Tamura, H. / Wada, Y. / Tsutsui, K. / Ootomo, S.

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Micro-area analysis in SIMS depth profiling by mesa-structure preparation

Seki, S. / Tamura, H. / Wada, Y. / Tsutsui, K. / Ootomo, S.

Micro-area analysis in SIMS depth profiling by mesa-structure preparation

Seki, S. / Tamura, H. / Wada, Y. / Tsutsui, K. / Ootomo, S.

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Order at Subito €

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Document information

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Document information

Title:

Micro-area analysis in SIMS depth profiling by mesa-structure preparation

Contributors:

Seki, S. (author) / Tamura, H. (author) / Wada, Y. (author) / Tsutsui, K. (author) / Ootomo, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 1373-1376

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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