Simulation Study for HTCVD of SiC Using First-Principles Calculation and Thermo-Fluid Analysis: Fid-Bau Portal

Simulation Study for HTCVD of SiC Using First-Principles Calculation and Thermo-Fluid Analysis

Kitou, Y. / Makino, E. / Inaba, K. / Hosokawa, N. / Hiramatsu, H. / Hasegawa, J. / Onda, S. / Tsuboi, H. / Takaba, H. / Miyamoto, A.

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Simulation Study for HTCVD of SiC Using First-Principles Calculation and Thermo-Fluid Analysis

Kitou, Y. / Makino, E. / Inaba, K. / Hosokawa, N. / Hiramatsu, H. / Hasegawa, J. / Onda, S. / Tsuboi, H. / Takaba, H. / Miyamoto, A.

Simulation Study for HTCVD of SiC Using First-Principles Calculation and Thermo-Fluid Analysis

Kitou, Y. / Makino, E. / Inaba, K. / Hosokawa, N. / Hiramatsu, H. / Hasegawa, J. / Onda, S. / Tsuboi, H. / Takaba, H. / Miyamoto, A.

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Document information

Title:

Simulation Study for HTCVD of SiC Using First-Principles Calculation and Thermo-Fluid Analysis

Contributors:

Kitou, Y. (author) / Makino, E. (author) / Inaba, K. (author) / Hosokawa, N. (author) / Hiramatsu, H. (author) / Hasegawa, J. (author) / Onda, S. (author) / Tsuboi, H. (author) / Takaba, H. (author) / Miyamoto, A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 47-50

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Kitou, Y. / Makino, E. / Ikeda, K. et al. | British Library Online Contents | 2006

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HTCVD Grown Semi-Insulating SiC Substrates

Ellison, A. / Magnusson, B. / Son, N. T. et al. | British Library Online Contents | 2003

Observation of Vacancy Clusters in HTCVD Grown SiC

Aavikko, R. / Saarinen, K. / Magnusson, B. et al. | British Library Online Contents | 2005

Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane

Makarov, Y.N. / Talalaev, R.A. / Vorob ev, A.N. et al. | British Library Online Contents | 2009