P- and n-Type Doping in SiC Sublimation Epitaxy Using Highly Doped Substrates: Fid-Bau Portal

P- and n-Type Doping in SiC Sublimation Epitaxy Using Highly Doped Substrates

Hens, P. / Syvajarvi, M. / Oehlschlager, F. / Wellmann, P.J. / Yakimova, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

P- and n-Type Doping in SiC Sublimation Epitaxy Using Highly Doped Substrates

Hens, P. / Syvajarvi, M. / Oehlschlager, F. / Wellmann, P.J. / Yakimova, R.

P- and n-Type Doping in SiC Sublimation Epitaxy Using Highly Doped Substrates

Hens, P. / Syvajarvi, M. / Oehlschlager, F. / Wellmann, P.J. / Yakimova, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

P- and n-Type Doping in SiC Sublimation Epitaxy Using Highly Doped Substrates

Contributors:

Hens, P. (author) / Syvajarvi, M. (author) / Oehlschlager, F. (author) / Wellmann, P.J. (author) / Yakimova, R. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 85-88

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Lebedev, S.P. / Lebedev, A.A. / Abramov, P.L. et al. | British Library Online Contents | 2009

Low-doped 6H-SiC n-type epilayers grown by sublimation epitaxy

Savkina, N. S. / Lebedev, A. A. / Davydov, D. V. et al. | British Library Online Contents | 2000

Properties of 3C-SiC Grown by Sublimation Epitaxy on Different Type of Substrates

Beshkova, M. / Lorenzzi, J. / Jegenyes, N. et al. | British Library Online Contents | 2010

Investigation of Low Doped n-Type and p-Type 3C-SiC Layers Grown on 6H-SiC Substrates by Sublimation Epitaxy

Zoulis, G. / Sun, J.W. / Beshkova, M. et al. | British Library Online Contents | 2010

Growth of p-Type SiC Layer by Sublimation Epitaxy

Ohta, S. / Furusho, T. / Takagi, H. et al. | British Library Online Contents | 2003