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Effect of High Temperature Oxidation of 4H-SiC on the Near-Interface Traps Measured by TDRC
Effect of High Temperature Oxidation of 4H-SiC on the Near-Interface Traps Measured by TDRC
Effect of High Temperature Oxidation of 4H-SiC on the Near-Interface Traps Measured by TDRC
Allerstam, F. (author) / Sveinbjornsson, E.O. (author)
MATERIALS SCIENCE FORUM ; 615/617 ; 537-540
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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