Impact of Oxidation Conditions and Surface Defects on the Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC: Fid-Bau Portal

Impact of Oxidation Conditions and Surface Defects on the Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Hatakeyama, T. / Suzuki, T. / Ichinoseki, K. / Matsuhata, H. / Fukuda, K. / Shinohe, T. / Arai, K.

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Impact of Oxidation Conditions and Surface Defects on the Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Hatakeyama, T. / Suzuki, T. / Ichinoseki, K. / Matsuhata, H. / Fukuda, K. / Shinohe, T. / Arai, K.

Impact of Oxidation Conditions and Surface Defects on the Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Hatakeyama, T. / Suzuki, T. / Ichinoseki, K. / Matsuhata, H. / Fukuda, K. / Shinohe, T. / Arai, K.

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Title:

Impact of Oxidation Conditions and Surface Defects on the Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Contributors:

Hatakeyama, T. (author) / Suzuki, T. (author) / Ichinoseki, K. (author) / Matsuhata, H. (author) / Fukuda, K. (author) / Shinohe, T. (author) / Arai, K. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M.

Published in:

Silicon Carbide and Related Materials 2009 ; 799-804

MATERIALS SCIENCE FORUM ; 645/648

Publication date:

2010-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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