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    Scaling effects on microstructure and reliability for Cu interconnects

    New search for: Ho, P.S.
    New search for: Zschech, E.
    New search for: Schmeisser, D.
    New search for: Meyer, M.A.
    New search for: Huebner, R.
    New search for: Hauschildt, M.
    New search for: Zhang, L.
    New search for: Gall, M.
    New search for: Kraatz, M.

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    Scaling effects on microstructure and reliability for Cu interconnects

    New search for: Ho, P.S.
    New search for: Zschech, E.
    New search for: Schmeisser, D.
    New search for: Meyer, M.A.
    New search for: Huebner, R.
    New search for: Hauschildt, M.
    New search for: Zhang, L.
    New search for: Gall, M.
    New search for: Kraatz, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Scaling effects on microstructure and reliability for Cu interconnects

    New search for: Ho, P.S.
    New search for: Zschech, E.
    New search for: Schmeisser, D.
    New search for: Meyer, M.A.
    New search for: Huebner, R.
    New search for: Hauschildt, M.
    New search for: Zhang, L.
    New search for: Gall, M.
    New search for: Kraatz, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Scaling effects on microstructure and reliability for Cu interconnects

    Contributors:

    Ho, P.S. (author) / Zschech, E. (author) / Schmeisser, D. (author) / Meyer, M.A. (author) / Huebner, R. (author) / Hauschildt, M. (author) / Zhang, L. (author) / Gall, M. (author) / Kraatz, M. (author)

    Published in:

    INTERNATIONAL JOURNAL OF MATERIALS RESEARCH ; 101 ; 216-227

    Publication date:

    2010-01-01

    Size:

    12 pages

    ISSN:

    1862-5282

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  669.9

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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