Low temperature fabrication of 510nm SiO2/Si structure using advanced nitric acid oxidation of silicon (NAOS) method: Fid-Bau Portal

Low temperature fabrication of 510nm SiO2/Si structure using advanced nitric acid oxidation of silicon (NAOS) method

Fukaya, Y. / Yanase, T. / Kubota, Y. / Imai, S. / Matsumoto, T. / Kobayashi, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Low temperature fabrication of 510nm SiO2/Si structure using advanced nitric acid oxidation of silicon (NAOS) method

Fukaya, Y. / Yanase, T. / Kubota, Y. / Imai, S. / Matsumoto, T. / Kobayashi, H.

Low temperature fabrication of 510nm SiO2/Si structure using advanced nitric acid oxidation of silicon (NAOS) method

Fukaya, Y. / Yanase, T. / Kubota, Y. / Imai, S. / Matsumoto, T. / Kobayashi, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Low temperature fabrication of 510nm SiO2/Si structure using advanced nitric acid oxidation of silicon (NAOS) method

Contributors:

Fukaya, Y. (author) / Yanase, T. (author) / Kubota, Y. (author) / Imai, S. (author) / Matsumoto, T. (author) / Kobayashi, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 5610-5613

Publication date:

2010-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Kobayashi, H. / Imamura, K. / Kim, W. B. et al. | British Library Online Contents | 2010

Ultrathin SiO2 layer formed by the nitric acid oxidation of Si (NAOS) method to improve the thermal-SiO2/Si interface for crystalline Si solar cells

Matsumoto, Taketoshi / Nakajima, Hiroki / Irishika, Daichi et al. | British Library Online Contents | 2017

Ultrathin SiO2 layer formed by the nitric acid oxidation of Si (NAOS) method to improve the thermal-SiO2/Si interface for crystalline Si solar cells

Matsumoto, Taketoshi / Nakajima, Hiroki / Irishika, Daichi et al. | British Library Online Contents | 2017

Acoustic spectroscopy and electrical characterization of Si/NAOS-SiO2/HfO2 structures

Bury, P. / Matsumoto, T. / Bellan, I. et al. | British Library Online Contents | 2013

Nitric acid oxidation method to form SiO2/3C-SiC structure at 120degreeC

Im, S. S. / Terakawa, S. / Iwasa, H. et al. | British Library Online Contents | 2008