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Molecular dynamics simulations of the sputtering process of silicon and the homoepitaxial growth of a Si coating on silicon
Molecular dynamics simulations of the sputtering process of silicon and the homoepitaxial growth of a Si coating on silicon
Molecular dynamics simulations of the sputtering process of silicon and the homoepitaxial growth of a Si coating on silicon
Prskalo, A. P. (author) / Schmauder, S. (author) / Ziebert, C. (author) / Ye, J. (author) / Ulrich, S. (author)
COMPUTATIONAL MATERIALS SCIENCE ; 50 ; 1320-1325
2011-01-01
6 pages
Article (Journal)
English
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