Impact of Surface Morphology on the Electrical Properties of Al/Ti Ohmic Contacts on Al-Implanted 4H-SiC: Fid-Bau Portal

Impact of Surface Morphology on the Electrical Properties of Al/Ti Ohmic Contacts on Al-Implanted 4H-SiC

Frazzetto, A. / Roccaforte, F. / Giannazzo, F. / Nigro, R.L. / Bongiorno, C. / Di Franco, S. / Weng, M.H. / Saggio, M. / Zanetti, E. / Raineri, V.

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Impact of Surface Morphology on the Electrical Properties of Al/Ti Ohmic Contacts on Al-Implanted 4H-SiC

Frazzetto, A. / Roccaforte, F. / Giannazzo, F. / Nigro, R.L. / Bongiorno, C. / Di Franco, S. / Weng, M.H. / Saggio, M. / Zanetti, E. / Raineri, V.

Impact of Surface Morphology on the Electrical Properties of Al/Ti Ohmic Contacts on Al-Implanted 4H-SiC

Frazzetto, A. / Roccaforte, F. / Giannazzo, F. / Nigro, R.L. / Bongiorno, C. / Di Franco, S. / Weng, M.H. / Saggio, M. / Zanetti, E. / Raineri, V.

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Title:

Impact of Surface Morphology on the Electrical Properties of Al/Ti Ohmic Contacts on Al-Implanted 4H-SiC

Contributors:

Frazzetto, A. (author) / Roccaforte, F. (author) / Giannazzo, F. (author) / Nigro, R.L. (author) / Bongiorno, C. (author) / Di Franco, S. (author) / Weng, M.H. (author) / Saggio, M. (author) / Zanetti, E. (author) / Raineri, V. (author)

Published in:

Silicon Carbide and Related Materials 2010 ; 413-416

MATERIALS SCIENCE FORUM ; 679/680

Publication date:

2011-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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