TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching: Fid-Bau Portal

TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Sadakuni, S. / Dai, N.X. / Sano, Y. / Arima, K. / Yagi, K. / Murata, J. / Okamoto, T. / Tachibana, K. / Yamauchi, K.

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TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Sadakuni, S. / Dai, N.X. / Sano, Y. / Arima, K. / Yagi, K. / Murata, J. / Okamoto, T. / Tachibana, K. / Yamauchi, K.

TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Sadakuni, S. / Dai, N.X. / Sano, Y. / Arima, K. / Yagi, K. / Murata, J. / Okamoto, T. / Tachibana, K. / Yamauchi, K.

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Title:

TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Contributors:

Sadakuni, S. (author) / Dai, N.X. (author) / Sano, Y. (author) / Arima, K. (author) / Yagi, K. (author) / Murata, J. (author) / Okamoto, T. (author) / Tachibana, K. (author) / Yamauchi, K. (author) / Monakhov, E.V.

Published in:

Silicon Carbide and Related Materials 2010 ; 489-492

MATERIALS SCIENCE FORUM ; 679/680

Publication date:

2011-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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