Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching: Fid-Bau Portal

Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Bui, P.V. / Sadakuni, S. / Okamoto, T. / Arima, K. / Sano, Y. / Yamauchi, K.

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Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Bui, P.V. / Sadakuni, S. / Okamoto, T. / Arima, K. / Sano, Y. / Yamauchi, K.

Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Bui, P.V. / Sadakuni, S. / Okamoto, T. / Arima, K. / Sano, Y. / Yamauchi, K.

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Title:

Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Contributors:

Bui, P.V. (author) / Sadakuni, S. (author) / Okamoto, T. (author) / Arima, K. (author) / Sano, Y. (author) / Yamauchi, K. (author) / Lebedev, A.A. / Davydov, S.Y. / Ivanov, P.A. / Levinshtein, M.E.

Published in:

Silicon Carbide and Related Materials 2012 Selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6, 2012, St. Petersburg, Russian Federation ; 510-513

MATERIALS SCIENCE FORUM ; 740/742

Publication date:

2013-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Sadakuni, S. / Pho, B.V. / Dai, N.X. et al. | British Library Online Contents | 2012

TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Sadakuni, S. / Dai, N.X. / Sano, Y. et al. | British Library Online Contents | 2011

High-Resolution TEM Observation of 4H-SiC (0001) Surface Planarized by Catalyst-Referred Etching

Pho, B.V. / Sadakuni, S. / Okamoto, T. et al. | British Library Online Contents | 2012

Damage-Free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching

Hara, H. / Sano, Y. / Mimura, H. et al. | British Library Online Contents | 2007

Infrared and Raman study of H-terminated Si(100) surfaces produced by etching solutions

Miyata, N. / Watanabe, S. / Okamura, S. | British Library Online Contents | 1997