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Development of 4H-SiC MOSFETs with Phosphorus-Doped Gate Oxide
Development of 4H-SiC MOSFETs with Phosphorus-Doped Gate Oxide
Development of 4H-SiC MOSFETs with Phosphorus-Doped Gate Oxide
Okamoto, D. (author) / Yano, H. (author) / Hatayama, T. (author) / Fuyuki, T. (author)
MATERIALS SCIENCE FORUM ; 717/720 ; 733-738
2012-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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