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Eutectic and solid-state wafer bonding of silicon with gold

Abouie, M. / Liu, Q. / Ivey, D. G.

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Eutectic and solid-state wafer bonding of silicon with gold

Abouie, M. / Liu, Q. / Ivey, D. G.

Eutectic and solid-state wafer bonding of silicon with gold

Abouie, M. / Liu, Q. / Ivey, D. G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Eutectic and solid-state wafer bonding of silicon with gold

Contributors:

Abouie, M. (author) / Liu, Q. (author) / Ivey, D. G. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 177 ; 1748-1758

Publication date:

2012-01-01

Size:

11 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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