Copper diffusivity in boron-doped silicon wafer measured by dynamic secondary ion mass spectrometry: Fid-Bau Portal

Copper diffusivity in boron-doped silicon wafer measured by dynamic secondary ion mass spectrometry

Koh, S. / You, A. / Tou, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Copper diffusivity in boron-doped silicon wafer measured by dynamic secondary ion mass spectrometry

Koh, S. / You, A. / Tou, T.

Copper diffusivity in boron-doped silicon wafer measured by dynamic secondary ion mass spectrometry

Koh, S. / You, A. / Tou, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Copper diffusivity in boron-doped silicon wafer measured by dynamic secondary ion mass spectrometry

Contributors:

Koh, S. (author) / You, A. (author) / Tou, T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 178 ; 321-325

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Mesli, A. / Heiser, T. / Mulheim, E. | British Library Online Contents | 1994

Delineation of Flow Pattern Defects in Heavily Boron-doped Czochralski Silicon Wafer

Fang, M. / Yang, D.-r. / Ma, X.-y. et al. | British Library Online Contents | 2006

Thermal diffusivity of surface-microstructured silicon measured by photothermal deflection technique

Chen, X. / Zhu, J. / Yin, G. et al. | British Library Online Contents | 2006

Boron-doped silicon nano-wires

Niu, J. J. / Wang, J. N. / Chen, Y. X. | British Library Online Contents | 2007

Secondary ion mass spectrometry characterization of indium-implanted silicon wafers

Blackmer-Krasinski, C. / Morinville, W. R. | British Library Online Contents | 2004