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    Development of tantalum oxynitride thin films produced by PVD: Study of structural stability

    New search for: Cristea, D.
    New search for: Crisan, A.
    New search for: Barradas, N. P.
    New search for: Alves, E.
    New search for: Moura, C.
    New search for: Vaz, F.
    New search for: Cunha, L.
    New search for: Suzer, S.
    New search for: Munteanu, D.
    New search for: Vaz, F.
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    Development of tantalum oxynitride thin films produced by PVD: Study of structural stability

    New search for: Cristea, D.
    New search for: Crisan, A.
    New search for: Barradas, N. P.
    New search for: Alves, E.
    New search for: Moura, C.
    New search for: Vaz, F.
    New search for: Cunha, L.
    New search for: Suzer, S.
    New search for: Munteanu, D.
    New search for: Vaz, F.
    New search for: Ruset, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Development of tantalum oxynitride thin films produced by PVD: Study of structural stability

    New search for: Cristea, D.
    New search for: Crisan, A.
    New search for: Barradas, N. P.
    New search for: Alves, E.
    New search for: Moura, C.
    New search for: Vaz, F.
    New search for: Cunha, L.
    New search for: Suzer, S.
    New search for: Munteanu, D.
    New search for: Vaz, F.
    New search for: Ruset, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Development of tantalum oxynitride thin films produced by PVD: Study of structural stability

    Contributors:

    Cristea, D. (author) / Crisan, A. (author) / Barradas, N. P. (author) / Alves, E. (author) / Moura, C. (author) / Vaz, F. (author) / Cunha, L. (author) / Suzer, S. / Munteanu, D. / Vaz, F.

    Published in:

    8th International Conference on Materials science and Engineering - BRAMAT 2013, Transilvania university of Brasov - Romania ; 19-26

    APPLIED SURFACE SCIENCE ; 285

    Publication date:

    2013-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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