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    Study of the La-related dipole in TiN/LaOx/HfSiON/SiON/Si gate stacks using hard X-ray photoelectron spectroscopy and backside medium energy ion scattering

    New search for: Boujamaa, R.
    New search for: Martinez, E.
    New search for: Pierre, F.
    New search for: Renault, O.
    New search for: Detlefs, B.
    New search for: Zegenhagen, J.
    New search for: Baudot, S.
    New search for: Gros-Jean, M.
    New search for: Bertin, F.
    New search for: Dubourdieu, C.

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    Study of the La-related dipole in TiN/LaOx/HfSiON/SiON/Si gate stacks using hard X-ray photoelectron spectroscopy and backside medium energy ion scattering

    New search for: Boujamaa, R.
    New search for: Martinez, E.
    New search for: Pierre, F.
    New search for: Renault, O.
    New search for: Detlefs, B.
    New search for: Zegenhagen, J.
    New search for: Baudot, S.
    New search for: Gros-Jean, M.
    New search for: Bertin, F.
    New search for: Dubourdieu, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study of the La-related dipole in TiN/LaOx/HfSiON/SiON/Si gate stacks using hard X-ray photoelectron spectroscopy and backside medium energy ion scattering

    New search for: Boujamaa, R.
    New search for: Martinez, E.
    New search for: Pierre, F.
    New search for: Renault, O.
    New search for: Detlefs, B.
    New search for: Zegenhagen, J.
    New search for: Baudot, S.
    New search for: Gros-Jean, M.
    New search for: Bertin, F.
    New search for: Dubourdieu, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Study of the La-related dipole in TiN/LaOx/HfSiON/SiON/Si gate stacks using hard X-ray photoelectron spectroscopy and backside medium energy ion scattering

    Contributors:

    Boujamaa, R. (author) / Martinez, E. (author) / Pierre, F. (author) / Renault, O. (author) / Detlefs, B. (author) / Zegenhagen, J. (author) / Baudot, S. (author) / Gros-Jean, M. (author) / Bertin, F. (author) / Dubourdieu, C. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 335 ; 71-77

    Publication date:

    2015-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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