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Impact of thermal annealing on Ge-on-Insulator substrate fabricated by wafer bonding
Impact of thermal annealing on Ge-on-Insulator substrate fabricated by wafer bonding
Impact of thermal annealing on Ge-on-Insulator substrate fabricated by wafer bonding
Kang, J. (author) / Yu, X. (author) / Takenaka, M. (author) / Takagi, S. (author)
Materials science in semiconductor processing ; 42 ; 259-263
2016-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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