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    Densification of ∼5nm-thick SiO2 layers by nitric acid oxidation

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    Densification of ∼5nm-thick SiO2 layers by nitric acid oxidation

    New search for: Choi, Jaeyoung
    New search for: Joo, Soyeong
    New search for: Park, Tae Joo
    New search for: Kim, Woo-Byoung

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Densification of ∼5nm-thick SiO2 layers by nitric acid oxidation

    New search for: Choi, Jaeyoung
    New search for: Joo, Soyeong
    New search for: Park, Tae Joo
    New search for: Kim, Woo-Byoung

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Densification of ∼5nm-thick SiO2 layers by nitric acid oxidation

    Contributors:

    Choi, Jaeyoung (author) / Joo, Soyeong (author) / Park, Tae Joo (author) / Kim, Woo-Byoung (author)

    Published in:

    Applied surface science ; 413 ; 92-98

    Publication date:

    2017-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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