Metal-assisted homogeneous etching of single crystal silicon: A novel approach to obtain an ultra-thin silicon wafer

Bai, F. / Li, M. / Song, D. et al. | British Library Online Contents | 2013

Fabrication of bifacial wafer-scale silicon nanowire arrays with ultra-high aspect ratio through controllable metal-assisted chemical etching

Liu, Y. / Sun, W. / Jiang, Y. et al. | British Library Online Contents | 2015

Fabrication of silicon wafer with ultra low reflectance by chemical etching method

Cao, Y. / Liu, A. / Li, H. et al. | British Library Online Contents | 2011

Metal Assisted Chemical Etching of Silicon: A Review

Huang, Z. / Geyer, N. / Werner, P. et al. | British Library Online Contents | 2011

Chemical Etching Behavior of Single-crystal Silicon Slice

Wen, J.-b. / Fan, L.-m. / Zhao, S.-l. et al. | British Library Online Contents | 2007