Spectroscopic ellipsometry characterization of amorphous and crystalline TiO2 thin films grown by atomic layer deposition at different temperatures: Fid-Bau Portal

Spectroscopic ellipsometry characterization of amorphous and crystalline TiO2 thin films grown by atomic layer deposition at different temperatures

Saha, D. / Ajimsha, R.S. / Rajiv, K. / Mukherjee, C. / Gupta, M. / Misra, P. / Kukreja, L.M.

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Spectroscopic ellipsometry characterization of amorphous and crystalline TiO2 thin films grown by atomic layer deposition at different temperatures

Saha, D. / Ajimsha, R.S. / Rajiv, K. / Mukherjee, C. / Gupta, M. / Misra, P. / Kukreja, L.M.

Spectroscopic ellipsometry characterization of amorphous and crystalline TiO2 thin films grown by atomic layer deposition at different temperatures

Saha, D. / Ajimsha, R.S. / Rajiv, K. / Mukherjee, C. / Gupta, M. / Misra, P. / Kukreja, L.M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Spectroscopic ellipsometry characterization of amorphous and crystalline TiO2 thin films grown by atomic layer deposition at different temperatures

Contributors:

Saha, D. (author) / Ajimsha, R.S. (author) / Rajiv, K. (author) / Mukherjee, C. (author) / Gupta, M. (author) / Misra, P. (author) / Kukreja, L.M. (author)

Published in:

Applied surface science ; 315 ; 116-123

Publication date:

2014-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

Saha, D. / Ajimsha, R. S. / Rajiv, K. et al. | British Library Online Contents | 2014

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Aarik, J. / Aidla, A. / Mandar, H. et al. | British Library Online Contents | 2001

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