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ITiO rotary target material and preparation method thereof
The invention relates to an ITiO rotary target material and a preparation method thereof. The preparation method of the ITiO rotating target material comprises the following steps: uniformly mixing 90-99.5 parts by mass of In2O3 nano-powder, 0.5-10 parts by mass of TiO2 nano-powder, 0.5-5 parts by mass of a dispersing agent, 0.5-5 parts by mass of an adhesive and water, and grinding to obtain slurry; wherein the specific surface area of the In2O3 nano-powder is 5m<2>/g-20m<2>/g, and the specific surface area of the TiO2 nano-powder is 20m<2>/g-50m<2>/g; the slurry is subjected to spray granulation, and ITiO powder is obtained; the ITiO powder is placed into a mold, and isostatic cool pressing is carried out to obtain a rotary target biscuit; and sintering and annealing are carried out on the rotary target material biscuit to obtain the ITiO rotary target material. Proved by tests, the relative density of the ITiO rotary target material prepared by the preparation method of the ITiO rotating target material is greater than or equal to 98%; and the resistivity of the ITiO rotary target material is smaller than or equal to 4.0*10<-4>omega.cm. Therefore, the high-performance ITiO rotary target material with good density and conductivity can be obtained through the preparation method of the ITiO rotating target material.
本发明涉及一种ITiO旋转靶材及其制备方法。ITiO旋转靶材的制备方法包括如下步骤：按照质量份数，将90份～99.5份的InO纳米粉体、0.5份～10份的TiO纳米粉体、0.5份～5份的分散剂、0.5份～5份的粘接剂与水混合均匀，研磨后得到浆料；其中，InO纳米粉体的比表面积为5m/g～20m/g，TiO纳米粉体的比表面积为20m/g～50m/g；将浆料进行喷雾造粒，得到ITiO粉体；将ITiO粉体装入模具中，使用冷等静压成型，得到旋转靶材素坯；以及将旋转靶材素坯进行烧结，退火之后得到ITiO旋转靶材。经试验证明，本发明的上述ITiO旋转靶材的制备方法制备得到ITiO旋转靶材的相对密度≥98％，ITiO旋转靶材的电阻率≤4.0×10Ω·cm，因此，通过上述ITiO旋转靶材的制备方法能够得到致密度和导电性良好的高性能ITiO旋转靶材。
ITiO rotary target material and preparation method thereof
The invention relates to an ITiO rotary target material and a preparation method thereof. The preparation method of the ITiO rotating target material comprises the following steps: uniformly mixing 90-99.5 parts by mass of In2O3 nano-powder, 0.5-10 parts by mass of TiO2 nano-powder, 0.5-5 parts by mass of a dispersing agent, 0.5-5 parts by mass of an adhesive and water, and grinding to obtain slurry; wherein the specific surface area of the In2O3 nano-powder is 5m<2>/g-20m<2>/g, and the specific surface area of the TiO2 nano-powder is 20m<2>/g-50m<2>/g; the slurry is subjected to spray granulation, and ITiO powder is obtained; the ITiO powder is placed into a mold, and isostatic cool pressing is carried out to obtain a rotary target biscuit; and sintering and annealing are carried out on the rotary target material biscuit to obtain the ITiO rotary target material. Proved by tests, the relative density of the ITiO rotary target material prepared by the preparation method of the ITiO rotating target material is greater than or equal to 98%; and the resistivity of the ITiO rotary target material is smaller than or equal to 4.0*10<-4>omega.cm. Therefore, the high-performance ITiO rotary target material with good density and conductivity can be obtained through the preparation method of the ITiO rotating target material.
本发明涉及一种ITiO旋转靶材及其制备方法。ITiO旋转靶材的制备方法包括如下步骤：按照质量份数，将90份～99.5份的InO纳米粉体、0.5份～10份的TiO纳米粉体、0.5份～5份的分散剂、0.5份～5份的粘接剂与水混合均匀，研磨后得到浆料；其中，InO纳米粉体的比表面积为5m/g～20m/g，TiO纳米粉体的比表面积为20m/g～50m/g；将浆料进行喷雾造粒，得到ITiO粉体；将ITiO粉体装入模具中，使用冷等静压成型，得到旋转靶材素坯；以及将旋转靶材素坯进行烧结，退火之后得到ITiO旋转靶材。经试验证明，本发明的上述ITiO旋转靶材的制备方法制备得到ITiO旋转靶材的相对密度≥98％，ITiO旋转靶材的电阻率≤4.0×10Ω·cm，因此，通过上述ITiO旋转靶材的制备方法能够得到致密度和导电性良好的高性能ITiO旋转靶材。
ITiO rotary target material and preparation method thereof
ITiO旋转靶材及其制备方法
GAN ZHIJIAN (author) / ZHUANG ZHIJIE (author) / ZHU BIN (author) / ZHUANG MENG (author) / YANG BIN (author)
2020-06-05
Patent
Electronic Resource
Chinese
Sintering method for tubular rotary ceramic target material
| European Patent Office | 2020