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A platform for research: civil engineering, architecture and urbanism
IZO target material and preparation method thereof
The invention provides an IZO target material and a preparation method thereof, and belongs to the technical field of target materials, and the method comprises the following steps: uniformly mixing indium oxide powder, doped metal oxide powder and zinc oxide powder in water to obtain slurry with the solid content of 55-65%; adding a polyethylene carboxylic acid dispersant into the slurry, stirring for 28-32 minutes, grinding in a sand mill, adding a polyvinyl alcohol binder, dispersing for 28-32 minutes, and performing spray granulation to prepare powder; sequentially carrying out cold press molding and cold isostatic pressing molding on powder prepared by spray granulation to obtain a cold isostatic pressing biscuit; and the cold isostatic pressing biscuit is sequentially subjected to degreasing sintering and furnace cooling to the room temperature, then machining treatment is conducted, and the IZO target material is obtained. The IZO target material disclosed by the invention is high in relative density, low in resistivity, high in bending strength, uniform in structure component and correct in grain size, and has excellent electrical and mechanical properties.
本发明给出了一种IZO靶材及其制备方法，属于靶材技术领域，该方法包括：将氧化铟粉末、掺杂金属氧化物粉末和氧化锌粉末在水中混合均匀，得到固含量为55～65％的浆料；向所述浆料加入聚乙烯羧酸分散剂后，搅拌28～32分钟，并在砂磨机内研磨，再加入聚乙烯醇粘结剂，分散28～32分钟后，喷雾造粒制成粉末；将喷雾造粒制成的粉末依次进行冷压成型和冷等静压成型，得到冷等静压素坯；将所述冷等静压素坯依次进行脱脂烧结、随炉冷却至室温后，再进行机械加工处理，得到IZO靶材。本发明的IZO靶材的相对密度高，电阻率低，弯曲强度高，组织成分均匀，晶粒尺寸校，具有优良的电学及力学性能。
IZO target material and preparation method thereof
The invention provides an IZO target material and a preparation method thereof, and belongs to the technical field of target materials, and the method comprises the following steps: uniformly mixing indium oxide powder, doped metal oxide powder and zinc oxide powder in water to obtain slurry with the solid content of 55-65%; adding a polyethylene carboxylic acid dispersant into the slurry, stirring for 28-32 minutes, grinding in a sand mill, adding a polyvinyl alcohol binder, dispersing for 28-32 minutes, and performing spray granulation to prepare powder; sequentially carrying out cold press molding and cold isostatic pressing molding on powder prepared by spray granulation to obtain a cold isostatic pressing biscuit; and the cold isostatic pressing biscuit is sequentially subjected to degreasing sintering and furnace cooling to the room temperature, then machining treatment is conducted, and the IZO target material is obtained. The IZO target material disclosed by the invention is high in relative density, low in resistivity, high in bending strength, uniform in structure component and correct in grain size, and has excellent electrical and mechanical properties.
本发明给出了一种IZO靶材及其制备方法，属于靶材技术领域，该方法包括：将氧化铟粉末、掺杂金属氧化物粉末和氧化锌粉末在水中混合均匀，得到固含量为55～65％的浆料；向所述浆料加入聚乙烯羧酸分散剂后，搅拌28～32分钟，并在砂磨机内研磨，再加入聚乙烯醇粘结剂，分散28～32分钟后，喷雾造粒制成粉末；将喷雾造粒制成的粉末依次进行冷压成型和冷等静压成型，得到冷等静压素坯；将所述冷等静压素坯依次进行脱脂烧结、随炉冷却至室温后，再进行机械加工处理，得到IZO靶材。本发明的IZO靶材的相对密度高，电阻率低，弯曲强度高，组织成分均匀，晶粒尺寸校，具有优良的电学及力学性能。
IZO target material and preparation method thereof
一种IZO靶材及其制备方法
MENG JIANG (author) / HU QIANGNAN (author) / ZHENG WEIXING (author) / LI ZHENGFEI (author) / LUO WEN (author) / ZHANG SHUAI (author) / ZUO NINGWEI (author) / YANG LONG (author) / HAN JIANHUA (author) / WANG HUAN (author)
2023-12-22
Patent
Electronic Resource
Chinese