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Silicon nitride ceramic substrate green body, preparation method thereof and ceramic substrate
The invention discloses a preparation method of a silicon nitride ceramic substrate green body. The method comprises the following steps of: firing silicon powder in a nitrogen atmosphere; and carrying out tape casting to obtain a silicon nitride ceramic substrate green body finished product. According to the method, the firing temperature ranges from 1250 DEG C to 1400 DEG C. Correspondingly, the invention also discloses a silicon nitride ceramic substrate green body which is prepared by the preparation method. The invention also discloses a silicon nitride ceramic substrate which is obtained by firing the silicon nitride ceramic substrate green body. By implementing the method, the green body strength of the silicon nitride ceramic substrate green body can be improved, the breakage rate and the edge peeling probability during cutting after tape casting can be reduced, the edge deformation can be reduced, and the production yield of the silicon nitride ceramic substrate can be effectively improved.
本发明公开了一种氮化硅陶瓷基板生坯的制备方法，包括：将硅粉在氮气气氛中灼烧后流延成型，即得氮化硅陶瓷基板坯体生坯成品；其中，灼烧温度为1250~1400℃。相应的，本发明还公开了一种氮化硅陶瓷基板生坯，其由上述制备方法制备而得。本发明还公开了一种氮化硅陶瓷基板，其由上述氮化硅陶瓷基板生坯烧制而得。实施本发明，可提升氮化硅陶瓷基板生坯的生坯强度，降低流延成型后裁切时的破损率，边缘剥落几率，减少边缘变形，有效提升了氮化硅陶瓷基板生产成品率。
Silicon nitride ceramic substrate green body, preparation method thereof and ceramic substrate
The invention discloses a preparation method of a silicon nitride ceramic substrate green body. The method comprises the following steps of: firing silicon powder in a nitrogen atmosphere; and carrying out tape casting to obtain a silicon nitride ceramic substrate green body finished product. According to the method, the firing temperature ranges from 1250 DEG C to 1400 DEG C. Correspondingly, the invention also discloses a silicon nitride ceramic substrate green body which is prepared by the preparation method. The invention also discloses a silicon nitride ceramic substrate which is obtained by firing the silicon nitride ceramic substrate green body. By implementing the method, the green body strength of the silicon nitride ceramic substrate green body can be improved, the breakage rate and the edge peeling probability during cutting after tape casting can be reduced, the edge deformation can be reduced, and the production yield of the silicon nitride ceramic substrate can be effectively improved.
本发明公开了一种氮化硅陶瓷基板生坯的制备方法，包括：将硅粉在氮气气氛中灼烧后流延成型，即得氮化硅陶瓷基板坯体生坯成品；其中，灼烧温度为1250~1400℃。相应的，本发明还公开了一种氮化硅陶瓷基板生坯，其由上述制备方法制备而得。本发明还公开了一种氮化硅陶瓷基板，其由上述氮化硅陶瓷基板生坯烧制而得。实施本发明，可提升氮化硅陶瓷基板生坯的生坯强度，降低流延成型后裁切时的破损率，边缘剥落几率，减少边缘变形，有效提升了氮化硅陶瓷基板生产成品率。
Silicon nitride ceramic substrate green body, preparation method thereof and ceramic substrate
氮化硅陶瓷基板生坯及其制备方法、陶瓷基板
HUANG RONGXIA (author) / WU JIANBO (author) / LIU CHAOHUA (author) / LIN HUATAI (author)
2021-12-10
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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