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Silicon nitride ceramic substrate and preparation method thereof
The invention relates to the field of inorganic non-metallic materials, in particular to a silicon nitride ceramic substrate and a preparation method thereof. The invention provides a silicon nitride ceramic substrate. Raw materials of the silicon nitride ceramic substrate comprise silicon nitride, magnesium hydride and a substance containing rare earth metal elements. The silicon nitride, the substance containing the rare earth metal element and the specific magnesium hydride are combined, on one hand, the total amount of the oxygen element in the silicon nitride ceramic substrate is reduced, on the other hand, the proportion of lattice oxygen/non-lattice oxygen in the silicon nitride ceramic substrate is reduced, and then the heat conductivity is improved to a great extent.
本发明涉及无机非金属材料领域，具体涉及一种氮化硅陶瓷基片及其制备方法。本发明提供的一种氮化硅陶瓷基片，所述氮化硅陶瓷基片的原料包括氮化硅、氢化镁和含稀土金属元素的物质。本发明采用将氮化硅、含稀土金属元素的物质与特定的氢化镁进行组合，一方面降低了氮化硅陶瓷基片中氧元素的总量，另一方面降低了氮化硅陶瓷基片中晶格氧/非晶格氧的比例，进而极大程度的提高了热导率。
Silicon nitride ceramic substrate and preparation method thereof
The invention relates to the field of inorganic non-metallic materials, in particular to a silicon nitride ceramic substrate and a preparation method thereof. The invention provides a silicon nitride ceramic substrate. Raw materials of the silicon nitride ceramic substrate comprise silicon nitride, magnesium hydride and a substance containing rare earth metal elements. The silicon nitride, the substance containing the rare earth metal element and the specific magnesium hydride are combined, on one hand, the total amount of the oxygen element in the silicon nitride ceramic substrate is reduced, on the other hand, the proportion of lattice oxygen/non-lattice oxygen in the silicon nitride ceramic substrate is reduced, and then the heat conductivity is improved to a great extent.
本发明涉及无机非金属材料领域，具体涉及一种氮化硅陶瓷基片及其制备方法。本发明提供的一种氮化硅陶瓷基片，所述氮化硅陶瓷基片的原料包括氮化硅、氢化镁和含稀土金属元素的物质。本发明采用将氮化硅、含稀土金属元素的物质与特定的氢化镁进行组合，一方面降低了氮化硅陶瓷基片中氧元素的总量，另一方面降低了氮化硅陶瓷基片中晶格氧/非晶格氧的比例，进而极大程度的提高了热导率。
Silicon nitride ceramic substrate and preparation method thereof
一种氮化硅陶瓷基片及其制备方法
SUN FENG (author) / LI ZHI (author) / JIANG ZIFEI (author) / SHANG CHAOFENG (author) / WANG ZAIYI (author) / WANG JIANJUN (author) / LYU PEIYUAN (author) / ZHAO LIPING (author) / DIAO TONGHE (author) / YANG ZHIYUAN (author)
2024-07-19
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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