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Target material for RPD, transparent conductive film and preparation method and application thereof
The invention relates to a target material for RPD, a transparent conductive film and a preparation method and application of the transparent conductive film. The target material is composed of a matrix and a silicon element dispersed in the matrix. The substrate is prepared from the following preparation raw materials in percentage by mass: 93%-98.5% of indium trioxide, 1%-6% of cerium dioxide and 0.1%-2% of tin dioxide; the mass concentration of the silicon element in the target material is 5 ppm to 200 ppm. According to the target material disclosed by the invention, in a continuous coating process, cracks, cracks or splashing cannot be caused, and a crystalline transparent conductive film with low resistivity and high infrared light transmittance can be continuously and stably obtained; and meanwhile, the tin element is added on the basis of the cerium element, so that the obtained target material has a better conductive characteristic, and the conversion efficiency of a solar cell is improved.
本发明涉及一种用于RPD的靶材、透明导电薄膜及其制备方法与应用，该靶材由基体和分散在所述基体中的硅元素组成；所述基体由以下质量分数的制备原料组成：三氧化二铟93％～98.5％、二氧化铈1％～6％和二氧化锡0.1％～2％；所述靶材中硅元素的质量浓度为5ppm～200ppm。本发明的靶材在连续镀膜过程下，不会造成裂纹、破裂或者喷溅的产生其结果，可连续稳定地获得低的电阻率和高的红外光透射率的晶质的透明导电膜；同时在铈元素的基础上添加了锡元素，获得的靶材具有更好的导电特性，提升了太阳能电池的转化效率。
Target material for RPD, transparent conductive film and preparation method and application thereof
The invention relates to a target material for RPD, a transparent conductive film and a preparation method and application of the transparent conductive film. The target material is composed of a matrix and a silicon element dispersed in the matrix. The substrate is prepared from the following preparation raw materials in percentage by mass: 93%-98.5% of indium trioxide, 1%-6% of cerium dioxide and 0.1%-2% of tin dioxide; the mass concentration of the silicon element in the target material is 5 ppm to 200 ppm. According to the target material disclosed by the invention, in a continuous coating process, cracks, cracks or splashing cannot be caused, and a crystalline transparent conductive film with low resistivity and high infrared light transmittance can be continuously and stably obtained; and meanwhile, the tin element is added on the basis of the cerium element, so that the obtained target material has a better conductive characteristic, and the conversion efficiency of a solar cell is improved.
本发明涉及一种用于RPD的靶材、透明导电薄膜及其制备方法与应用，该靶材由基体和分散在所述基体中的硅元素组成；所述基体由以下质量分数的制备原料组成：三氧化二铟93％～98.5％、二氧化铈1％～6％和二氧化锡0.1％～2％；所述靶材中硅元素的质量浓度为5ppm～200ppm。本发明的靶材在连续镀膜过程下，不会造成裂纹、破裂或者喷溅的产生其结果，可连续稳定地获得低的电阻率和高的红外光透射率的晶质的透明导电膜；同时在铈元素的基础上添加了锡元素，获得的靶材具有更好的导电特性，提升了太阳能电池的转化效率。
Target material for RPD, transparent conductive film and preparation method and application thereof
一种用于RPD的靶材、透明导电薄膜及其制备方法与应用
CHEN MINGFEI (author) / LIU YONGCHENG (author) / GUO ZIXUAN (author) / MO GUOREN (author) / XU SHENGLI (author) / CHEN MINGGAO (author) / WANG ZHIJIE (author) / JIANG CHANGJIU (author)
2022-07-29
Patent
Electronic Resource
Chinese
Sputtering target, transparent conductive film and transparent electrode
| European Patent Office | 2015