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Heat-resistant and anti-oxidation silicon nitride ceramic substrate and preparation method thereof
The invention provides a heat-resistant and anti-oxidation silicon nitride ceramic substrate and a preparation method thereof, and relates to the technical field of ceramic material preparation. The invention provides powder comprising the following components in percentage by mass: 85-94% of silicon nitride, 3-8% of yttrium oxide, 1-5% of magnesium metal, 0.5-1% of titanium dioxide and 1-5% of niobium nitride. Carrying out ball-milling mixing on the powder, a binder, a dispersant and water, and then carrying out spray drying to obtain composite powder; and carrying out compression molding on the composite powder, and sequentially carrying out vacuum sintering and air pressure sintering to obtain the heat-resistant and antioxidant silicon nitride ceramic substrate. Experimental results of the embodiment show that after the heat-resistant and anti-oxidation silicon nitride ceramic substrate prepared by the preparation method provided by the invention is oxidized at 1100 DEG C for 100 hours, the oxidation weight gain is below 0.05 mg/cm < 2 >, the bending strength is 850 MPa, and compared with the bending strength of 862 MPa when the substrate is not oxidized, the bending strength is reduced by 1.4%.
本发明提供了一种耐热、抗氧化氮化硅陶瓷基板及其制备方法，涉及陶瓷材料制备技术领域。本发明提供质量百分比为氮化硅85～94％、氧化钇3～8％、金属镁1～5％、二氧化钛0.5～1％以及氮化铌1～5％的粉料；将所述粉料与粘结剂、分散剂和水进行球磨混合后喷雾干燥，得到复合粉体；将所述复合粉体模压成型后依次进行真空烧结和气压烧结，得到耐热、抗氧化氮化硅陶瓷基板。实施例的实验结果表明，本发明提供的制备方法制备的耐热、抗氧化氮化硅陶瓷基板在1100℃氧化100h后，氧化增重为0.05mg/cm2以下，弯曲强度为850MPa，与未氧化时的862MPa相比，降低1.4％。
Heat-resistant and anti-oxidation silicon nitride ceramic substrate and preparation method thereof
The invention provides a heat-resistant and anti-oxidation silicon nitride ceramic substrate and a preparation method thereof, and relates to the technical field of ceramic material preparation. The invention provides powder comprising the following components in percentage by mass: 85-94% of silicon nitride, 3-8% of yttrium oxide, 1-5% of magnesium metal, 0.5-1% of titanium dioxide and 1-5% of niobium nitride. Carrying out ball-milling mixing on the powder, a binder, a dispersant and water, and then carrying out spray drying to obtain composite powder; and carrying out compression molding on the composite powder, and sequentially carrying out vacuum sintering and air pressure sintering to obtain the heat-resistant and antioxidant silicon nitride ceramic substrate. Experimental results of the embodiment show that after the heat-resistant and anti-oxidation silicon nitride ceramic substrate prepared by the preparation method provided by the invention is oxidized at 1100 DEG C for 100 hours, the oxidation weight gain is below 0.05 mg/cm < 2 >, the bending strength is 850 MPa, and compared with the bending strength of 862 MPa when the substrate is not oxidized, the bending strength is reduced by 1.4%.
本发明提供了一种耐热、抗氧化氮化硅陶瓷基板及其制备方法，涉及陶瓷材料制备技术领域。本发明提供质量百分比为氮化硅85～94％、氧化钇3～8％、金属镁1～5％、二氧化钛0.5～1％以及氮化铌1～5％的粉料；将所述粉料与粘结剂、分散剂和水进行球磨混合后喷雾干燥，得到复合粉体；将所述复合粉体模压成型后依次进行真空烧结和气压烧结，得到耐热、抗氧化氮化硅陶瓷基板。实施例的实验结果表明，本发明提供的制备方法制备的耐热、抗氧化氮化硅陶瓷基板在1100℃氧化100h后，氧化增重为0.05mg/cm2以下，弯曲强度为850MPa，与未氧化时的862MPa相比，降低1.4％。
Heat-resistant and anti-oxidation silicon nitride ceramic substrate and preparation method thereof
一种耐热、抗氧化氮化硅陶瓷基板及其制备方法
ZENG XIAOFENG (author) / GAO PENGZHAO (author) / QIN HANG (author) / ZHU FULIN (author) / XIAO LIANG (author) / QIAN LIHONG (author)
2024-02-02
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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