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Silicon nitride substrate and preparation method thereof
The invention relates to the technical field of silicon nitride substrates, provides a silicon nitride substrate and a preparation method thereof, and solves the problems that a silicon nitride substrate produced in the prior art is relatively poor in thermal conductivity and cannot be industrially produced in batches. The silicon nitride substrate comprises the following raw materials in parts by weight: 90-95 parts of raw material powder, 8-15 parts of a composite sintering aid, 2-5 parts of a dispersant, 2-5 parts of an organic solvent, 2-5 parts of a binder and 2-5 parts of a plasticizer.
本发明涉及氮化硅基板技术领域，提供一种氮化硅基板及其制备方法，解决现有技术生产的氮化硅基板导热率较差、无法批量工业化生产的问题；所述氮化硅基板包括以下重量份的原料：90‑95份原料粉末、8‑15份复合烧结助剂、2‑5份分散剂、2‑5份有机溶剂、2‑5份粘结剂、2‑5份增塑剂。
Silicon nitride substrate and preparation method thereof
The invention relates to the technical field of silicon nitride substrates, provides a silicon nitride substrate and a preparation method thereof, and solves the problems that a silicon nitride substrate produced in the prior art is relatively poor in thermal conductivity and cannot be industrially produced in batches. The silicon nitride substrate comprises the following raw materials in parts by weight: 90-95 parts of raw material powder, 8-15 parts of a composite sintering aid, 2-5 parts of a dispersant, 2-5 parts of an organic solvent, 2-5 parts of a binder and 2-5 parts of a plasticizer.
本发明涉及氮化硅基板技术领域，提供一种氮化硅基板及其制备方法，解决现有技术生产的氮化硅基板导热率较差、无法批量工业化生产的问题；所述氮化硅基板包括以下重量份的原料：90‑95份原料粉末、8‑15份复合烧结助剂、2‑5份分散剂、2‑5份有机溶剂、2‑5份粘结剂、2‑5份增塑剂。
Silicon nitride substrate and preparation method thereof
一种氮化硅基板及其制备方法
YANG DASHENG (author) / SHI CHUNXI (author) / FENG JIAWEI (author)
2024-05-07
Patent
Electronic Resource
Chinese
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| European Patent Office | 2024
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| European Patent Office | 2021