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Preparation method of aluminum nitride multilayer electrostatic chuck
The invention discloses a preparation method of an aluminum nitride multilayer electrostatic chuck, which comprises the following steps: S1, putting carbon black, aluminum nitride powder, lanthanum chloride and ethanol into a ball mill to obtain aluminum nitride mixed slurry; s2, performing spray granulation on the mixed slurry through a closed spray granulation tower to form granulation powder; s3, pressing the prepared ceramic granulation powder into a flaky ceramic blank body; s4, preparing a metal electrode layer on the upper surface of the ceramic blank body by using a photoetching device, and carrying out metallization exposure and etching by using a photoetching exposure machine; s5, repeating the operations of S3 and S4 for 7 times to form seven ceramic blanks with metal electrode layers on the upper surfaces; S6, combining to form seven layers of ceramic-metal sheets; S7, cutting the composite ceramic-metal blanks by using a laser cutting machine; and S8, the compounded ceramic-metal blank is put into a sintering furnace, and a finished electrostatic chuck is obtained. The clamping times from gluing to photoetching are reduced through the photoetching device, and the damage to the ceramic blank is reduced.
本发明公开了一种氮化铝多层静电吸盘制备方法，包括以下步骤：S1：将炭黑、氮化铝粉末、氯化镧、乙醇放到球磨机中，得到氮化铝混合浆料；S2：将混合浆料通过闭式喷雾造粒塔喷雾造粒，形成造粒粉；S3：将做好的陶瓷造粒粉压制成片状陶瓷胚体；S4：使用光刻装置在陶瓷胚体上表面制备金属电极层，通过光刻曝光机进行金属化曝光和刻蚀；S5：重复S3和S4操作7次，形成七片上表面均附带有金属电极层的陶瓷胚体S6：结合成7层陶瓷‑金属片，S7：使用激光切割机对复合陶瓷‑金属胚体进行切割；S8：将复合的陶瓷‑金属胚体放入烧结炉中，得到静电吸盘成品；通过光刻装置减少涂胶到光刻的夹持次数，减少对陶瓷胚体的损坏。
Preparation method of aluminum nitride multilayer electrostatic chuck
The invention discloses a preparation method of an aluminum nitride multilayer electrostatic chuck, which comprises the following steps: S1, putting carbon black, aluminum nitride powder, lanthanum chloride and ethanol into a ball mill to obtain aluminum nitride mixed slurry; s2, performing spray granulation on the mixed slurry through a closed spray granulation tower to form granulation powder; s3, pressing the prepared ceramic granulation powder into a flaky ceramic blank body; s4, preparing a metal electrode layer on the upper surface of the ceramic blank body by using a photoetching device, and carrying out metallization exposure and etching by using a photoetching exposure machine; s5, repeating the operations of S3 and S4 for 7 times to form seven ceramic blanks with metal electrode layers on the upper surfaces; S6, combining to form seven layers of ceramic-metal sheets; S7, cutting the composite ceramic-metal blanks by using a laser cutting machine; and S8, the compounded ceramic-metal blank is put into a sintering furnace, and a finished electrostatic chuck is obtained. The clamping times from gluing to photoetching are reduced through the photoetching device, and the damage to the ceramic blank is reduced.
本发明公开了一种氮化铝多层静电吸盘制备方法，包括以下步骤：S1：将炭黑、氮化铝粉末、氯化镧、乙醇放到球磨机中，得到氮化铝混合浆料；S2：将混合浆料通过闭式喷雾造粒塔喷雾造粒，形成造粒粉；S3：将做好的陶瓷造粒粉压制成片状陶瓷胚体；S4：使用光刻装置在陶瓷胚体上表面制备金属电极层，通过光刻曝光机进行金属化曝光和刻蚀；S5：重复S3和S4操作7次，形成七片上表面均附带有金属电极层的陶瓷胚体S6：结合成7层陶瓷‑金属片，S7：使用激光切割机对复合陶瓷‑金属胚体进行切割；S8：将复合的陶瓷‑金属胚体放入烧结炉中，得到静电吸盘成品；通过光刻装置减少涂胶到光刻的夹持次数，减少对陶瓷胚体的损坏。
Preparation method of aluminum nitride multilayer electrostatic chuck
一种氮化铝多层静电吸盘制备方法
DONG JINYONG (author) / HUANG YIFANG (author) / ZHAO DONG (author)
2024-05-24
Patent
Electronic Resource
Chinese
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