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Aluminum nitride electrostatic chuck and preparation method thereof
The invention relates to an aluminum nitride electrostatic chuck, an aluminum nitride electrostatic chuck with ceramic layers with different functions and a preparation method of the aluminum nitride electrostatic chuck. According to the aluminum nitride electrostatic chuck, the forming process of three-layer step-by-step hydraulic pressure, cold isostatic pressing and integrated sintering is adopted, good flatness and parallelism are achieved, and then the uniformity of the electrostatic adsorption force or the temperature control performance of the electrostatic chuck is improved. The aluminum nitride electrostatic chuck with the ceramic layers with different functions comprises a first ceramic layer, an electrostatic electrode, a second ceramic layer, a heating electrode and a third ceramic layer, the electrostatic electrode is located between the first ceramic layer and the second ceramic layer, and the heating electrode is located between the second ceramic layer and the third ceramic layer; the components and contents of the first ceramic layer, the second ceramic layer and the third ceramic layer are different, the chemical components, the crystal phase composition and the thermal and electrical properties of each layer of ceramic are different after integral sintering, and then the functions of different emphasis of all the ceramic layers are achieved.
本发明涉及氮化铝静电卡盘、具有不同功能陶瓷层的氮化铝静电卡盘及其制备方法。本发明的氮化铝静电卡盘，使用三层逐级液压、冷等静压和一体烧结的成型工艺，具有较好的平整度与平行度，进而提高静电卡盘的静电吸附力或控温性能的均匀性。本发明的具有不同功能陶瓷层的氮化铝静电卡盘，包括第一陶瓷层、静电电极、第二陶瓷层、加热电极和第三陶瓷层，所述静电电极位于第一陶瓷层与第二陶瓷层之间，加热电极位于第二陶瓷层和第三陶瓷层之间；所述第一陶瓷层、第二陶瓷层和第三陶瓷层的成分和含量均不相同，在一体烧结后实现每层陶瓷的化学成分、晶相组成、热学电学性质均不相同，进而实现各陶瓷层的不同侧重的功能。
Aluminum nitride electrostatic chuck and preparation method thereof
The invention relates to an aluminum nitride electrostatic chuck, an aluminum nitride electrostatic chuck with ceramic layers with different functions and a preparation method of the aluminum nitride electrostatic chuck. According to the aluminum nitride electrostatic chuck, the forming process of three-layer step-by-step hydraulic pressure, cold isostatic pressing and integrated sintering is adopted, good flatness and parallelism are achieved, and then the uniformity of the electrostatic adsorption force or the temperature control performance of the electrostatic chuck is improved. The aluminum nitride electrostatic chuck with the ceramic layers with different functions comprises a first ceramic layer, an electrostatic electrode, a second ceramic layer, a heating electrode and a third ceramic layer, the electrostatic electrode is located between the first ceramic layer and the second ceramic layer, and the heating electrode is located between the second ceramic layer and the third ceramic layer; the components and contents of the first ceramic layer, the second ceramic layer and the third ceramic layer are different, the chemical components, the crystal phase composition and the thermal and electrical properties of each layer of ceramic are different after integral sintering, and then the functions of different emphasis of all the ceramic layers are achieved.
本发明涉及氮化铝静电卡盘、具有不同功能陶瓷层的氮化铝静电卡盘及其制备方法。本发明的氮化铝静电卡盘，使用三层逐级液压、冷等静压和一体烧结的成型工艺，具有较好的平整度与平行度，进而提高静电卡盘的静电吸附力或控温性能的均匀性。本发明的具有不同功能陶瓷层的氮化铝静电卡盘，包括第一陶瓷层、静电电极、第二陶瓷层、加热电极和第三陶瓷层，所述静电电极位于第一陶瓷层与第二陶瓷层之间，加热电极位于第二陶瓷层和第三陶瓷层之间；所述第一陶瓷层、第二陶瓷层和第三陶瓷层的成分和含量均不相同，在一体烧结后实现每层陶瓷的化学成分、晶相组成、热学电学性质均不相同，进而实现各陶瓷层的不同侧重的功能。
Aluminum nitride electrostatic chuck and preparation method thereof
一种氮化铝静电卡盘及其制备方法
ZHANG LUO (author) / QIU DONGXING (author) / LI YIFAN (author) / AI JUNDI (author) / LI BO (author)
2024-09-10
Patent
Electronic Resource
Chinese
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