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Silicon nitride ceramic substrate and preparation method thereof
The invention relates to the field of ceramic materials, in particular to a silicon nitride ceramic substrate and a preparation method thereof.The silicon nitride ceramic substrate is prepared from, by weight, 80-100 parts of silicon nitride, 5-10 parts of carbon nanotubes, 5-10 parts of a sintering aid, 5-10 parts of a binder, 1-3 parts of dibutyl phthalate, 1-3 parts of ammonium polyacrylate and 50-70 parts of deionized water. The binder is sulfonic modified polyvinyl alcohol, rare earth fluoride and nano iron particles are deposited on the surfaces of the carbon nanotubes, the prepared silicon nitride ceramic substrate has high mechanical strength and excellent heat-conducting property, a water-based tape casting process is adopted, use of a large amount of organic solvent is avoided, and the silicon nitride ceramic substrate is environment-friendly and energy-saving. The safety and environmental protection problems in the large-scale production process are fewer, and the application requirements of high-integration circuit packaging substrate materials can be met.
本发明涉及陶瓷材料领域，具体为一种氮化硅陶瓷基板及其制备方法，由以下重量份数的原料制备而成：氮化硅80‑100份、碳纳米管5‑10份、烧结助剂5‑10份、粘结剂5‑10份、邻苯二甲酸二丁酯1‑3份、聚丙烯酸铵1‑3份、去离子水50‑70份，所述粘结剂为磺酸基改性聚乙烯醇，所述碳纳米管表面沉积有稀土氟化物和纳米铁粒子，本发明所制备的氮化硅陶瓷基板具有较高的力学强度和优异的导热性能，而且采用水基流延成型工艺，避免了大量有机溶剂的使用，大规模生产过程中安全和环保问题更少，可以满足高集成化电路封装基板材料的应用需求。
Silicon nitride ceramic substrate and preparation method thereof
The invention relates to the field of ceramic materials, in particular to a silicon nitride ceramic substrate and a preparation method thereof.The silicon nitride ceramic substrate is prepared from, by weight, 80-100 parts of silicon nitride, 5-10 parts of carbon nanotubes, 5-10 parts of a sintering aid, 5-10 parts of a binder, 1-3 parts of dibutyl phthalate, 1-3 parts of ammonium polyacrylate and 50-70 parts of deionized water. The binder is sulfonic modified polyvinyl alcohol, rare earth fluoride and nano iron particles are deposited on the surfaces of the carbon nanotubes, the prepared silicon nitride ceramic substrate has high mechanical strength and excellent heat-conducting property, a water-based tape casting process is adopted, use of a large amount of organic solvent is avoided, and the silicon nitride ceramic substrate is environment-friendly and energy-saving. The safety and environmental protection problems in the large-scale production process are fewer, and the application requirements of high-integration circuit packaging substrate materials can be met.
本发明涉及陶瓷材料领域，具体为一种氮化硅陶瓷基板及其制备方法，由以下重量份数的原料制备而成：氮化硅80‑100份、碳纳米管5‑10份、烧结助剂5‑10份、粘结剂5‑10份、邻苯二甲酸二丁酯1‑3份、聚丙烯酸铵1‑3份、去离子水50‑70份，所述粘结剂为磺酸基改性聚乙烯醇，所述碳纳米管表面沉积有稀土氟化物和纳米铁粒子，本发明所制备的氮化硅陶瓷基板具有较高的力学强度和优异的导热性能，而且采用水基流延成型工艺，避免了大量有机溶剂的使用，大规模生产过程中安全和环保问题更少，可以满足高集成化电路封装基板材料的应用需求。
Silicon nitride ceramic substrate and preparation method thereof
一种氮化硅陶瓷基板及其制备方法
FANG HAOJIE (author) / HE YIWEN (author) / ZHANG XIAOYUN (author) / ZHANG GUOXIU (author) / FANG MEILING (author) / LIU JIANPING (author) / ZENG XIONG (author)
2025-01-24
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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