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COPPER/CERAMIC ASSEMBLY, INSULATED CIRCUIT BOARD, METHOD FOR PRODUCING COPPER/CERAMIC ASSEMBLY, AND METHOD FOR PRODUCING INSULATED CIRCUIT BOARD
To provide: a copper/ceramic assembly which is capable of suppressing the generation of cracks of a ceramic member even if a severe cold heat cycle is loaded, and also which is excellent in migration resistance; an insulated circuit board; a method for producing a copper/ceramic assembly; and a method for producing an insulated circuit board.SOLUTION: There is provided a copper/ceramic assembly in which a copper member 12 comprising copper or a copper alloy is bonded to a ceramic member 11 comprising a nitrogen-containing ceramic. A Mg solid solution layer in which Mg is solid-solved in a Cu matrix phase is formed at a bonding interface between the copper member 12 and the ceramic member 11, and an active metal nitride layer 41 containing nitrides of one or two or more active metals selected from among Ti, Zr, Nb and Hf is formed on the ceramic member 11 side of the bonding interface. The thickness of the active metal nitride layer 41 is within the range of 0.05 μm or more and 1.2 μm or less.SELECTED DRAWING: Figure 2
【課題】厳しい冷熱サイクルを負荷した場合であってもセラミックス部材の割れの発生を抑制することができるとともに、耐マイグレーション性に優れた銅/セラミックス接合体、絶縁回路基板、及び、銅/セラミックス接合体の製造方法、絶縁回路基板の製造方法を提供する。【解決手段】銅又は銅合金からなる銅部材12と、窒素含有セラミックスからなるセラミックス部材11とが接合されてなる銅/セラミックス接合体であって、銅部材12とセラミックス部材11との接合界面においては、Cuの母相中にMgが固溶したMg固溶層が形成されるとともに、セラミックス部材11側に、Ti,Zr,Nb,Hfから選択される1種又は2種以上の活性金属の窒化物を含む活性金属窒化物層41が形成されており、この活性金属窒化物層41の厚さが0.05μm以上1.2μm以下の範囲内とされている。【選択図】図2
COPPER/CERAMIC ASSEMBLY, INSULATED CIRCUIT BOARD, METHOD FOR PRODUCING COPPER/CERAMIC ASSEMBLY, AND METHOD FOR PRODUCING INSULATED CIRCUIT BOARD
To provide: a copper/ceramic assembly which is capable of suppressing the generation of cracks of a ceramic member even if a severe cold heat cycle is loaded, and also which is excellent in migration resistance; an insulated circuit board; a method for producing a copper/ceramic assembly; and a method for producing an insulated circuit board.SOLUTION: There is provided a copper/ceramic assembly in which a copper member 12 comprising copper or a copper alloy is bonded to a ceramic member 11 comprising a nitrogen-containing ceramic. A Mg solid solution layer in which Mg is solid-solved in a Cu matrix phase is formed at a bonding interface between the copper member 12 and the ceramic member 11, and an active metal nitride layer 41 containing nitrides of one or two or more active metals selected from among Ti, Zr, Nb and Hf is formed on the ceramic member 11 side of the bonding interface. The thickness of the active metal nitride layer 41 is within the range of 0.05 μm or more and 1.2 μm or less.SELECTED DRAWING: Figure 2
【課題】厳しい冷熱サイクルを負荷した場合であってもセラミックス部材の割れの発生を抑制することができるとともに、耐マイグレーション性に優れた銅/セラミックス接合体、絶縁回路基板、及び、銅/セラミックス接合体の製造方法、絶縁回路基板の製造方法を提供する。【解決手段】銅又は銅合金からなる銅部材12と、窒素含有セラミックスからなるセラミックス部材11とが接合されてなる銅/セラミックス接合体であって、銅部材12とセラミックス部材11との接合界面においては、Cuの母相中にMgが固溶したMg固溶層が形成されるとともに、セラミックス部材11側に、Ti,Zr,Nb,Hfから選択される1種又は2種以上の活性金属の窒化物を含む活性金属窒化物層41が形成されており、この活性金属窒化物層41の厚さが0.05μm以上1.2μm以下の範囲内とされている。【選択図】図2
COPPER/CERAMIC ASSEMBLY, INSULATED CIRCUIT BOARD, METHOD FOR PRODUCING COPPER/CERAMIC ASSEMBLY, AND METHOD FOR PRODUCING INSULATED CIRCUIT BOARD
銅/セラミックス接合体、絶縁回路基板、及び、銅/セラミックス接合体の製造方法、絶縁回路基板の製造方法
TERASAKI NOBUYUKI (author)
2021-05-06
Patent
Electronic Resource
Japanese
European Patent Office | 2021
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