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A platform for research: civil engineering, architecture and urbanism
CERAMIC HEATER WITH HEAT SHIELDING EFFECT OR ELECTROSTATIC CHUCK WITH CERAMIC HEATER, AND MANUFACTURING METHOD THEREOF
To provide a ceramic heater with a built-in heater wire or an electrostatic chuck with a ceramic heater integrated with a low heat conductive ceramic having a heat shielding effect, and a manufacturing method thereof.SOLUTION: A heater manufacturing method includes the steps of forming activated joining layers 4-a and 4-b for joining on the surfaces of a ceramic layer 2 and a low heat conductive ceramic layer 5 with a built-in heater wire, and joining the joining layers, and further includes the steps of forming an activated joining layer for joining on the surfaces of a ceramic dielectric layer and a ceramic insulating layer on which the metal electrodes are formed, and similarly joining a ceramic electrostatic chuck that joins and integrates the joining layers and a ceramic layer with the built-in heater wire to which the low heat conductive ceramic layer is joined.SELECTED DRAWING: Figure 1
【課題】熱遮蔽効果を有する低熱伝導セラミックと一体化した、ヒーター線内設セラミック製ヒーターまたはセラミック製ヒーター付き静電チャックおよびそれらの製造方法を提供する。【解決手段】ヒータの製造方法において、ヒーター線内設セラミック層２と低熱伝導セラミック層５の表面に、接合のための活性化接合層４−ａ、４−ｂを形成する工程と、接合層同士を接合する工程と、を含む。セラミック製ヒーター付き静電チャックの場合は、金属電極を形成したセラミック誘電体層とセラミック絶縁体層の表面に、接合のための活性化接合層を形成する工程と、接合層同士を接合し一体化したセラミック製静電チャックと、低熱伝導セラミック層が接合されたヒーター線内設セラミック層を同様に接合する工程と、を含む。【選択図】図１
CERAMIC HEATER WITH HEAT SHIELDING EFFECT OR ELECTROSTATIC CHUCK WITH CERAMIC HEATER, AND MANUFACTURING METHOD THEREOF
To provide a ceramic heater with a built-in heater wire or an electrostatic chuck with a ceramic heater integrated with a low heat conductive ceramic having a heat shielding effect, and a manufacturing method thereof.SOLUTION: A heater manufacturing method includes the steps of forming activated joining layers 4-a and 4-b for joining on the surfaces of a ceramic layer 2 and a low heat conductive ceramic layer 5 with a built-in heater wire, and joining the joining layers, and further includes the steps of forming an activated joining layer for joining on the surfaces of a ceramic dielectric layer and a ceramic insulating layer on which the metal electrodes are formed, and similarly joining a ceramic electrostatic chuck that joins and integrates the joining layers and a ceramic layer with the built-in heater wire to which the low heat conductive ceramic layer is joined.SELECTED DRAWING: Figure 1
【課題】熱遮蔽効果を有する低熱伝導セラミックと一体化した、ヒーター線内設セラミック製ヒーターまたはセラミック製ヒーター付き静電チャックおよびそれらの製造方法を提供する。【解決手段】ヒータの製造方法において、ヒーター線内設セラミック層２と低熱伝導セラミック層５の表面に、接合のための活性化接合層４−ａ、４−ｂを形成する工程と、接合層同士を接合する工程と、を含む。セラミック製ヒーター付き静電チャックの場合は、金属電極を形成したセラミック誘電体層とセラミック絶縁体層の表面に、接合のための活性化接合層を形成する工程と、接合層同士を接合し一体化したセラミック製静電チャックと、低熱伝導セラミック層が接合されたヒーター線内設セラミック層を同様に接合する工程と、を含む。【選択図】図１
CERAMIC HEATER WITH HEAT SHIELDING EFFECT OR ELECTROSTATIC CHUCK WITH CERAMIC HEATER, AND MANUFACTURING METHOD THEREOF
熱遮蔽効果を有するセラミック製ヒーターとセラミック製ヒーター付き静電チャックおよびそれらの製造方法
MATSUBARA MANABU (author)
2021-09-16
Patent
Electronic Resource
Japanese
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