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Zero-Level Packaging for MEMS or MST Devices: The IRS Method
Zero-Level Packaging for MEMS or MST Devices: The IRS Method
Zero-Level Packaging for MEMS or MST Devices: The IRS Method
Tilmans, H. (Autor:in) / Van de Peer, M. (Autor:in) / Beyne, E. (Autor:in)
ADVANCING MICROELECTRONICS ; 27 ; 37-39
01.01.2000
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.381
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