Microdefects induced by cavitation for gettering in silicon wafer

Macodiyo, D. O. / Soyama, H. / Masakawa, T. et al. | British Library Online Contents | 2006

Generation of Oxidation Induced Stacking Faults in Cz Silicon Wafers

Sueoka, K. / Akatsuka, M. / Nishihara, K. et al. | British Library Online Contents | 1995

Gettering in silicon-on-insulator wafers with polysilicon layer

Savin, H. / Yli-Koski, M. / Haarahiltunen, A. et al. | British Library Online Contents | 2009

Minority and majority carrier traps associated with oxidation induced stacking faults in silicon

Evans, J. H. / Davidson, J. A. / Saritas, M. et al. | British Library Online Contents | 1995

Gettering of Cu in Silicon Wafer by Using Cavitation Impacts

Kumano, H. / Soyama, H. / Saka, M. | British Library Online Contents | 2004