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Impact of Ge content on the gate oxide reliability of strained-Si/SiGe MOS devices
Impact of Ge content on the gate oxide reliability of strained-Si/SiGe MOS devices
Impact of Ge content on the gate oxide reliability of strained-Si/SiGe MOS devices
Uppal, S. (Autor:in) / Kanoun, M. (Autor:in) / Varzgar, J. B. (Autor:in) / Chattopadhyay, S. (Autor:in) / Olsen, S. (Autor:in) / O'Neill, A. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135 ; 207-209
01.01.2006
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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