N+ plasma-assisted wafer bonding between silicon and chemical vapor deposition oxide at low temperature

Ma, X. / Liu, W. / Chen, C. et al. | British Library Online Contents | 2009

Silicon-to-indium tin oxide coated glass bonding for packaging of field emission arrays fabricated on silicon wafer

Choi, W. B. / Ju, B. K. / Lee, Y. H. et al. | British Library Online Contents | 1999

Oxide precipitation behavior in heavily doped silicon wafer after rapid thermal process

Sun, S. / Sun, W. / Hao, Q. et al. | British Library Online Contents | 2006

Silicon Wafer Bonding via Designed Monolayers

Steinkirchner, J. / Martini, T. / Reiche, M. et al. | British Library Online Contents | 1995

A comparative analysis of thermal gate oxide on strained Si/relaxed SiGe layer for reliability prediction of strained Si MOSFETs

Lee, S. G. / Kim, Y. P. / Lee, H. L. et al. | British Library Online Contents | 2005