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    Bisethylacetoacetato Cu(II) as a novel metal-organic precursor for Cu film production by plasma-enhanced chemical vapor deposition toward ultra-large-scale integration metallization

    New search for: Hwang, S. T.
    New search for: Shim, I.
    New search for: Lee, K. O.
    New search for: Kim, K. S.
    New search for: Kim, J. H.
    New search for: Choi, G. J.
    New search for: Cho, Y. S.
    New search for: Choi, H.

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    Bisethylacetoacetato Cu(II) as a novel metal-organic precursor for Cu film production by plasma-enhanced chemical vapor deposition toward ultra-large-scale integration metallization

    New search for: Hwang, S. T.
    New search for: Shim, I.
    New search for: Lee, K. O.
    New search for: Kim, K. S.
    New search for: Kim, J. H.
    New search for: Choi, G. J.
    New search for: Cho, Y. S.
    New search for: Choi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Bisethylacetoacetato Cu(II) as a novel metal-organic precursor for Cu film production by plasma-enhanced chemical vapor deposition toward ultra-large-scale integration metallization

    New search for: Hwang, S. T.
    New search for: Shim, I.
    New search for: Lee, K. O.
    New search for: Kim, K. S.
    New search for: Kim, J. H.
    New search for: Choi, G. J.
    New search for: Cho, Y. S.
    New search for: Choi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Bisethylacetoacetato Cu(II) as a novel metal-organic precursor for Cu film production by plasma-enhanced chemical vapor deposition toward ultra-large-scale integration metallization

    Contributors:

    Hwang, S. T. (author) / Shim, I. (author) / Lee, K. O. (author) / Kim, K. S. (author) / Kim, J. H. (author) / Choi, G. J. (author) / Cho, Y. S. (author) / Choi, H. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 1051-1060

    Publication date:

    1996-01-01

    Size:

    10 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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