Deep level defects in H^+ implanted 6H-SiC epilayers and in silicon carbide on insulator structures: Fid-Bau Portal

Deep level defects in H^+ implanted 6H-SiC epilayers and in silicon carbide on insulator structures

Hugonnard-Bruyere, E. / Lauer, V. / Guillot, G. / Jaussaud, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Deep level defects in H^+ implanted 6H-SiC epilayers and in silicon carbide on insulator structures

Hugonnard-Bruyere, E. / Lauer, V. / Guillot, G. / Jaussaud, C.

Deep level defects in H^+ implanted 6H-SiC epilayers and in silicon carbide on insulator structures

Hugonnard-Bruyere, E. / Lauer, V. / Guillot, G. / Jaussaud, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Deep level defects in H^+ implanted 6H-SiC epilayers and in silicon carbide on insulator structures

Contributors:

Hugonnard-Bruyere, E. (author) / Lauer, V. (author) / Guillot, G. (author) / Jaussaud, C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 382 - 388

Publication date:

1999-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Makhtari, A. / Raineri, V. / La Via, F. et al. | British Library Online Contents | 2001

Isothermal deep-level transient spectroscopy study of metastable defects in hydrogen-implanted n-type silicon

Tokuda, Y. / Nakamura, W. / Terashima, H. | British Library Online Contents | 2006

Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers

Reshanov, S. A. / Klettke, O. / Pensl, G. et al. | British Library Online Contents | 2003

Identities of the Deep Level Defects E~1/E~2 in 6H Silicon Carbide

Ling, C. C. / Chen, X. D. / Gong, M. et al. | British Library Online Contents | 2004

Stoichiometric Disturbances in Ion Implanted Silicon Carbide

Morvan, E. / Monserrat, J. / Rebollo, J. et al. | British Library Online Contents | 1998