Structural Characterization of Silicon Carbide Etched by Using a Combination of Ion Implantation and Wet Chemical Etching: Fid-Bau Portal

Structural Characterization of Silicon Carbide Etched by Using a Combination of Ion Implantation and Wet Chemical Etching

Henkel, T. / Ferro, G. / Nishizawa, S. / Pressler, H. / Tanaka, Y. / Tanoue, H. / Kobayashi, N.

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Structural Characterization of Silicon Carbide Etched by Using a Combination of Ion Implantation and Wet Chemical Etching

Henkel, T. / Ferro, G. / Nishizawa, S. / Pressler, H. / Tanaka, Y. / Tanoue, H. / Kobayashi, N.

Structural Characterization of Silicon Carbide Etched by Using a Combination of Ion Implantation and Wet Chemical Etching

Henkel, T. / Ferro, G. / Nishizawa, S. / Pressler, H. / Tanaka, Y. / Tanoue, H. / Kobayashi, N.

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Title:

Structural Characterization of Silicon Carbide Etched by Using a Combination of Ion Implantation and Wet Chemical Etching

Contributors:

Henkel, T. (author) / Ferro, G. (author) / Nishizawa, S. (author) / Pressler, H. (author) / Tanaka, Y. (author) / Tanoue, H. (author) / Kobayashi, N. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 481-484

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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