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Defect analysis of n-type silicon strained layers

Simoen, E. / Loo, R. / Roussel, P. / Caymax, M. / Bender, H. / Claeys, C. / Herzog, H. J. / Blondeel, A. / Clauws, P.

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Defect analysis of n-type silicon strained layers

Simoen, E. / Loo, R. / Roussel, P. / Caymax, M. / Bender, H. / Claeys, C. / Herzog, H. J. / Blondeel, A. / Clauws, P.

Defect analysis of n-type silicon strained layers

Simoen, E. / Loo, R. / Roussel, P. / Caymax, M. / Bender, H. / Claeys, C. / Herzog, H. J. / Blondeel, A. / Clauws, P.

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Title:

Defect analysis of n-type silicon strained layers

Contributors:

Simoen, E. (author) / Loo, R. (author) / Roussel, P. (author) / Caymax, M. (author) / Bender, H. (author) / Claeys, C. (author) / Herzog, H. J. (author) / Blondeel, A. (author) / Clauws, P. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 225-227

Publication date:

2001-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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