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Silicon Films Produced by PECVD under Powder Formation Conditions

Martins, R. / Aguas, H. / Silva, V. / Ferreira, I. / Cabrita, A. / Fortunato, E.

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Silicon Films Produced by PECVD under Powder Formation Conditions

Martins, R. / Aguas, H. / Silva, V. / Ferreira, I. / Cabrita, A. / Fortunato, E.

Silicon Films Produced by PECVD under Powder Formation Conditions

Martins, R. / Aguas, H. / Silva, V. / Ferreira, I. / Cabrita, A. / Fortunato, E.

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Order at Subito €

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Document information

Title:

Silicon Films Produced by PECVD under Powder Formation Conditions

Contributors:

Martins, R. (author) / Aguas, H. (author) / Silva, V. (author) / Ferreira, I. (author) / Cabrita, A. (author) / Fortunato, E. (author)

Published in:

MATERIALS SCIENCE FORUM ; 382 ; 21-30

Publication date:

2001-01-01

Size:

10 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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